D-XX

D

Comes complete with operator’s manual, software, cable (FMA65-C), and NIST certificate.

Power supply sold separately.

* Specify gas or gases and inlet/outlet pressure. Calibrations done at ambient [20ºC (70ºF)]

temperature only.

** Flow ranges specified are for nitrogen or air at 20 psig inlet (up to 50 SLM) or 25 psig inlet

(60 to 100 SLM units) and 0 psig outlet, see above ordering chart.

For RS232 communications (replaces RS485), add suffix “

-RS232” to model number, no

additional cost.

For 4 to 20 mA output (replaces 0 to 5V), add suffix “

-I” to model number, no additional cost.

For Perfluoroelastomer O-rings (replaces FKM O-rings), add suffix “

-K” to model number,

for additional cost.

Ordering Examples: FMA6512ST, mass flow controller, and FMA65PWC power supply.

FMA6542ST, mass flow controller, and FMA65PWC power supply.

Model No.

Description

FMA65-C

Replacement cable 25 pin D-conn with 1.8 m (6') wire, branch

to power supply

FMA65PWC

Power supply with 25 pin female D-conn 110 Vac (±15 Vdc)

branch 1.8 m (6') wire to computer port, stripped

FMA65PWA

Power supply with 25 pin female D-conn 110 Vac (±15 Vdc)

branch 1.8 m (6') wire to analog interface

FMA65EPWC

European power supply with 25 pin female D-conn 230 Vac

(±15 Vdc) branch 1.8 m (6') wire to computer port, stripped

FMA65UKPWC UK power supply with 25 pin female D-conn 230 Vac (±15 Vdc)

branch 1.8 m (6') wire to computer port, stripped

FMA65-C15

25 pin D-conn with 1.8 m (6') wire to 15 pin DM, branch 1.8 m

(6'), wire to computer port, stripped

FMA65-CAL-(*) 10-point NIST calibration per gas; specify up to 9 gases

(specify primary gas on FMA6500, inlet/outlet,

and temperature)

Accessories

FMA6502ST

shown smaller

than actual size.

To Order

Model No.

Maximum Flowrate**

Compression Fitting

Maximum Pressure Drop (psid)

FMA6502ST

10 SCCM

¹⁄₄

"

1.06

FMA6504ST

20 SCCM

¹⁄₄

"

1.06

FMA6506ST

50 SCCM

¹⁄₄

"

1.06

FMA6508ST

100 SCCM

¹⁄₄

"

1.06

FMA6510ST

200 SCCM

¹⁄₄

"

1.06

FMA6512ST

500 SCCM

¹⁄₄

"

1.06

FMA6514ST

1 SLM

¹⁄₄

"

1.06

FMA6516ST

2 SLM

¹⁄₄

"

1.06

FMA6518ST

5 SLM

¹⁄₄

"

1.06

FMA6520ST

10 SLM

¹⁄₄

"

3.87

FMA6523ST

15 SLM

¹⁄₄

"

2.00

FMA6524ST

20 SLM

¹⁄₄

"

3.50

FMA6526ST

30 SLM

¹⁄₄

"

8.00

FMA6528ST

50 SLM

¹⁄₄

"

8.00

FMA6540ST

60 SLM

³⁄₈

"

18.9

FMA6541ST

80 SLM

³⁄₈

"

18.9

FMA6542ST

100 SLM

³⁄₈

"

18.9