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FMA6540ST Datasheet(PDF) 2 Page - Omega Engineering, Inc.

Part # FMA6540ST
Description  gas Mass Flow Controllers With RS485 Standard and Alarm Functions For Clean Gases
PDF  4 Pages
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Manufacturer  OMEGA [Omega Engineering, Inc.]
Direct Link  https://www.omega.com/en-us/
Logo OMEGA - Omega Engineering, Inc.

FMA6540ST Datasheet(HTML) 2 Page - Omega Engineering, Inc.

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D-XX
D
Contact Closure
Two sets of dry contact relay
outputs are provided to actuate
user supplied equipment. These are
programmable via the digital interface
such that the relays can be made to
switch when a specified event occurs
(e.g. when a low or high flow alarm
limit is exceeded or when the totalizer
reaches a specified value).
Valve Override
Means are provided to force the
control valve fully open (purge) or
fully closed via either the analog or
digital interfaces.
Self Diagnostics
Whenever power is first applied,
the FMA6500ST runs a series
of self diagnostic tests to
ensure that it is in optimum
working condition.
Engineering Units
The flow setpoint, measured gas
flow and associated totalizer data
is scaled directly in engineering
units via digital interface com-
mands. The following units of
measure are supported: % of
FS, mL/min, mL/hr, scfm, scfh, sL/
min, sL/hr, lbs/hr, lbs/min, and one
user defined unit of measure.
Leak Integrity
1 x 10-9 smL/sec of helium
maximum to the outside
environment.
Balanced Power Supply
The FMA6500ST operates on
±15 Vdc. The current requirements
for the positive and negative power
supplies are balanced such that
the current in the power supply
common connection is minimized.
Maximum power consumption is
13.5 watts at ±15 Vdc.
Auto Zero
The FMA6500ST automatically
nulls the sensor zero offset
whenever the flow setpoint is below
2% FS. To accommodate this feature
the control valve must fully close
under that condition. Provisions are
made to either disable, force, or store
thecurrent auto zero via digital
commands.
Totalizer
The firmware for the FMA6500ST
provides functions to register total gas
quantity. The total mass of gas is
calculated by integrating the actual
gas flow rate with respect to time.
Digital interface commands are
provided to: set the totalizer to zero,
start/stop totalizing the flow, read the
totalizer, start the totalizer at a preset
flow, and stop the flow at a preset
total.
Multi-Gas Calibration Option
The FMA6500ST is capable of
storing primary calibration data for
up to 10 gases. This feature allows
the same FMA6500ST to be calibrated
for multiple gases while maintaining
the rated accuracy on each.
Standard 10-Point NIST
Calibration
Optional up to 9 additional 10-point
calibration may be ordered at an
additional cost per gas.
Conversion Factors
Conversion factors for up to 256 gases
are stored in the FMA6500ST.
Conversion factors may be applied
to any of the ten gas calibrations via
digital interface commands.
Flow Alarms
High and Low gas flow ALARM
limits are programmed using the
digital interface. Alarm conditions
are reported via the digital interface
or can activate the contact closure
outputs.
Programmable Flow
OMEGA® software supports
programmable flow modes, allowing
execution of custom programming
of up to ten steps. Various flow
configurations include ramping,
linearized increasing, and
decreasing modes.
Autotune
The autotune function allows the
FMA6500ST to automatically
optimize control response for the gas
under actual process conditions.
During the autotune process, the
instrument adjusts PID gains for
optimum step response and deter-
mine key control valve characteristics
(only available on units with less than
80 L/min maximum flow).
FMA6502ST, shown
smaller than actual size.
SPECIFICATIONS
Accuracy (including linearity):
15 to 25°C (59 to 77°F) and 0.7 to 4 bar
(10 to 60 psia): ±1% of FS, 0 to 50°C
(32 to 122°F) and 0.3 to 10 bar (5 to
150 psia): ±2% of FS, ±1% of FS at a
specific temperature and pressure
with special calibration
Repeatability: ±0.15% FS
Turndown Ratio: 50:1
Response Time: 0.6 to 1.0 s to within
±2% of setpoint over 20% to 100% FS
Temperature Coefficient:
0.05% of full scale/°C or better
Pressure Coefficient: 0.01% FS/psi
(0.07 bar) or better
Leak Integrity:
1 x 10-9 smL/sec Helium maximum to the
outside environment
Optimum Gas Pressure:
1.73 bar (25 psig)
Maximum Gas Pressure: 34.5 bar
(500 psig)
Maximum Diff. Pressure: 3.4 bar (50
psig) for up to 10 LPM, 2.8 bar (40 psig)
for 15 LPM and greater
Gas and Ambient Temperature:
5 to 50°C (41 to 122°F)
Output Signals: Linear 0 to 5 Vdc
(2000 Ω min load impedance);
0 to 10 Vdc (4000 Ω min impedance);
4 to 20 mA optional (0 to 500 Ω loop
resistance)
Communication Interface:
RS485, standard; RS232, optional
Transducer Input Power:
±15 Vdc, 450 mA maximum
Wetted Parts: 316 stainless steel,
416 stainless steel, FKM O-rings
Neoprene or Perfluoroelastomer
O-rings optional
Connections: Standard ¹⁄₄"
compression fittings up to 30 LPM
models; for 60 LPM models and greater:
³⁄₈
" compression fittings
Circuit Protection:
Circuit boards have built-in polarity
reversal protection; resettable fuses
provide power input protection
Calibration Options:
Standard 10-point NIST calibration
optional up to 9 additional 10-point
calibrations may be ordered for a
additional cost per gas



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