FMA6540ST datasheet(1/4 Pages) OMEGA

Part #	FMA6540ST

Description	gas Mass Flow Controllers With RS485 Standard and Alarm Functions For Clean Gases

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Manufacturer	OMEGA [Omega Engineering, Inc.]

Direct Link	https://www.omega.com/en-us/

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D-XX

U

Digital and Analog

Modes Operate

Simultaneously

U

Programmable Flow

Configurations

U

RS485 Standard,

Multi-Drop Capability

of Up to 256 units

U

Stores Calibration Data

for Up to 10 Gases

U

Totalizer Indicates

Total Gas Quantity

U

Alarm Limits for High

and Low Gas Flow

U

Conversion Factors

for Up to 256 Gases

U

Autotune Function

for Optimum

Control Response

U

Self Diagnostic Tests

Microprocessor driven digital flow

controllers allow one to program,

record, and analyze flow rates of

various gases with a computer via

an RS485 interface (optional

RS232 is available).

Controllers can be programmed for

various control functions including,

flow setpoint, totalizer, stop totalizer,

read totalizer, totalizer from preset

flow, stop at preset total, auto zero,

and more.

Principles of Operation

Metered gases are divided into two

laminar flow paths, one through the

primary flow conduit, and the other

through a capillary sensor tube.

Both flow conduits are designed

to ensure laminar flow, therefore,

the ratio of their flow rates remains

constant. Two precision temperature

sensing windings on the sensor

tube are heated, and when flow

takes place, gas carries heat from

the upstream to the downstream

windings. The resultant temperature

differential is proportional to the

change in resistance of the sensor

windings.

A Wheatstone bridge

design is used to monitor the

temperature dependent resistance

gradient on the sensor windings

which is linearly proportional to the

instantaneous rate of flow. The

output of the Wheatstone bridge

is converted to digital format with

a 12-Bit Adc (analog to digital

converter).

An on-board microprocessor and

nonvolatile memory store all

calibration factors and directly

control a proportional

electromagnetic valve. The digital

closed loop control system

continuously compares the mass

flow output with the selected flow

rate. Deviations from the setpoint are

corrected by compensating valve

adjustments, with PID algorithm,

thus maintaining the desired flow

parameters with a high degree of

accuracy. Output signals of

0 to 5 Vdc or 4 to 20 mA are

generated indicating mass molecular

based flow rates of the metered gas.

Interface

The digital interface operates

via RS485 (optional RS232) and

provides access to applicable

internal data including: flow set-

point, actual flow, zero adjustments,

and linearization table adjustments.

The analog interface provides 0 to

5 Vdc, 0 to 10 Vdc and 4 to 20 mA

inputs and outputs.

FMA6502ST shown

smaller than actual size.

FMA6500ST Series

gas Mass Flow Controllers

with rs485 standard and alarm Functions

For Clean gases

Standard

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FMA6540ST Datasheet(PDF) 1 Page - Omega Engineering, Inc.

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