Liquid Flow Sensor Module

FS1027

Datasheet

© 2017 Integrated Device Technology, Inc.

1

December 17, 2017

Description

The FS1027 MEMS Liquid Flow Sensor Module measures the flow

rate using the thermo-transfer (calorimetric) principle. The FS1027

is designed to measure liquids.

The FS1027 offers key advantages over resistor-based flow

solutions. The sensor utilizes thermopile sensing, which provides

an excellent signal-to-noise ratio. The sensor comprises a “solid”

thermal isolation technology and silicon-carbide coating, which

protects it from abrasive wear and provides robustness and long-

term reliability. In comparison, other sensors typically contain a

fragile membrane above an etched cavity for the thermal isolation

base.

There are no moving mechanical parts that can break in contrast

to other flow meter types, such as a turbine-type meter. The

FS1027 has minimal flow resistance, making it highly suitable for

gravity-feed applications or for replacing a high-power pump with a

lower power device.

The FS1027 complies with the NSF/ANSI 61: Drinking Water

System Components – Health Effects standard.

Typical Applications



Beverage equipment



Liquid-dispensing system



Process controls and monitoring



Fluid leak detection

Features



Liquid flow: 0 to 10 liters/min



Robust “solid” isolation technology



Resistant to surface contamination



No cavity to cause clogging



Resistant to vibration and pressure shock



Low-power application



Minimal flow resistance



Fast response: < 5ms



Flow voltage output: 0V to 4.5V (uncalibrated)



Thermistor voltage output: 1V to 4.5V



Supply voltage: 5V



Module operating temperature range: 5°C to +75°C

FS1027 Flow Sensor Module