SCR075

Nanopositioning Stage

Stage Specifications1

Units

SCR075-050

SCR075-100

SCR075-150

Travel/Stroke

mm

50

100

150

Stage Width (B)

mm

140

190

240

Accuracy

μm

3

5

7

Encoder Resolution

nm

1000, 500, 100, 50, 10

Bi-Directional Repeatability2

±1 count

Maximum Acceleration

m/s2

25

20

15

Maximum Velocity3

m/s

1.1

1.4

1.5

Load Capacity4

kg

45.5

Moving Mass

kg

0.55

0.7

0.93

Total Mass

kg

1

1.3

1.7

Straightness & Flatness

μm

2.5/25mm

Home Limit Switches

Standard

Home Switch Location

Center

Limit Switch Over Travel

mm

1

Hard Stop Over Travel

mm

2

Bearing

Cross-roller Bearing

Linear Shaft Motor

S080Q

The SCR075 stage is a complete single axis stage which integrates a slide guide, encoder,

and Linear Shaft Motor. It offers a wide range of advantages for applications requiring high

performance and accuracy. The Linear Shaft Motor allows for higher resolution, speed, and

continuous force than standard stepper or piezo servomotors.

The SCR075 uses a standard S080Q Linear Shaft Motor, however, the coil

windings are customizable to a double or triple winding. The SCR075 features a

moving magnet design, a precision ground cross roller, and a built-in encoder.

Each SCR stage requires a servo driver to operate the stage. Any two SCR stages

will bolt directly together to form a very stiff, compact X-Y assembly, without the

need for adaptor plates. Two SCR stages can be supplied as an X-Y stage to insure

true orthogonal orientation between the two axes.

Note 1: Standard stage specifications are based on the S080Q Linear Shaft Motor

Note 2: Repeatability +/- 2 counts at sub 0.1μm resolutions

Note 3: For 10nm (0.01μm) resolution, max velocity of encoder is limited to 135mm/sec; for 50nm

(0.05μm), the limit is 675mm/sec; and for 100nm (0.1μm), the limit is 1350mm/sec

Note 4: Please contact our Applications Engineers for loads exceeding 45.5kg

Stage Specifications

1

2

3

4

5

6

7

8

9

10

11

12

13

14

15

Pin

Signal

Function

2

0V

Ground

4

Z-

Reference Mark

5

B-

Incremental Signal

6

A-

Incremental Signal

7

5V

Power

8

5V

Power

9

0V

Ground

10

Q

Limit

11

P

Limit

12

Z+

Reference Mark

13

B+

Incremental Signal

14

A+

Incremental Signal

15

shield

info@nipponpulse.com

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1-540-633-1677

(kg)

Acceleration/Velocity Curves

0

200

400

600

800

1000

1200

1400

0.10

1.00

10.00

100.00

0.0

9.1

18.2

27.3

36.4

45.5

Load Mass (kg)

SCR075-050

ACC D coil

ACC T coil

ACC Q coil

Max VEL D coil

Max VEL T coil

Max VEL Q coil

SCR075-050

SCR075-100

SCR075-150

0

200

400

600

800

1000

1200

1400

1600

0.10

1.00

10.00

100.00

0.0

9.1

18.2

27.3

36.4

45.5

Load Mass (kg)

SCR075-100

ACC D coil

ACC T coil

ACC Q coil

Max VEL D coil

Max VEL T coil

Max VEL Q coil

0

200

400

600

800

1000

1200

1400

1600

1800

0.10

1.00

10.00

100.00

0.0

9.1

18.2

27.3

36.4

45.5

Load Mass (kg)

SCR075-150

ACC D coil

ACC T coil

ACC Q coil

Max VEL D coil

Max VEL T coil

Max VEL Q coil

Nippon Pulse

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