100882001 datasheet(3/20 Pages) MKS

Part #	100882001

Description	CF Component Ultra high vacuum fittings

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Manufacturer	MKS [MKS Instruments.]

Direct Link	https://www.mksinst.com/

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Series 88 Components

Gasket

Non-rotatable

Flange

Rotatable

Flange

Figure 1 —

CF Flange Installation

Standard size inch tubing provides easy and economical

connection to the user’s equipment. Full and half nipples,

adapters to a variety of other connection elements, tees,

elbows, crosses, and flexible metal hoses for vibration

isolation and movement give the line added versatility.

With its extensive engineering capabilities, MKS provides

custom designed and manufactured shapes and sizes of

components. Custom vacuum chambers can be fabricated

as well as unique space and time saving fittings and

adapters.

table 1 - gaskets and torque

size

metal gasket Dimensions

in/(mm)

maximum torque

for sealing

ft./lbs

(newton-meters)

Outer Diameter

Inner Diameter

1 1/3''

0.84/(21)

0.64/(16)

5/(7)

2 1/8''

1.29/(33)

1.01/(26)

16/(22)

2 3/4''

1.90/(48)

1.45/(37)

16/(22)

3 3/8''

2.43/(62)

2.01/(51)

26/(35)

4 1/2''

3.24/(82)

2.51/(64)

26/(35)

4 5/8''

3.60/(91)

3.01/(76)

26/(35)

Note: Metal gaskets are .08'' thick.

specifications

Minimum Pressure

(with metal seals)

10

-13 Torr

Leak Check

< 10

-9 std-cc/s

Materials

Components

Gaskets

Bolts

Type 304 Stainless Steel

Copper, Silver Plated Copper or

Viton

Type 304 Stainless or Silver Plated

Stainless

Metal Gasket Thickness

.08''/(2.03 mm)

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